Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.PH3-A1 Phosphine Sensor price is available in sensotec website.
Range: 10ppm limit of performance warranty
Sensitivity: 600 to 1000 nA/ppm in 5ppm PH3
Resolution: < 0.03 RMS noise (ppm equivalent
Response time t90: < 20 (s) from zero to 5ppm PH3