The WUD-20 series ultra high purity transducers combine state-of-the-art transducer concepts with analogue output signals. Thus the safest and most accurate pressure measurements necessary for today’s market requirements are provided.The WUD-26 can be readily installed in “on-tool” gas distribution systems.
Applications
Semiconductor, flat panel display and photovoltaic industry
Ultrapure gas supply in semiconductor production systems
Special features
High-accuracy pressure measurement 0.15 % RSS
Excellent long-term stability
Signal noise cancellation and shielding
Vacuum-referenced pressure measurement
Active temperature compensation
